SU-8 Epoxy Structures

Examples of SU-8 epoxy structures that are available as foundry processes. Structure heights from 1 micron to 1 millimeter (above and below) are possible and side-wall angle can also be controlled for various geometries.

At Tanner Labs, we have also developed this microstructuring capability in other polymers such as Parylene, Acrylic, PDMS, etc.