Elastomers

Elastomers are soft, flexible materials with a nominal elastic modulus in the range of 30 –1000 kPa. They can be used in a variety of MEMS and packaging applications as spacers, drivers, soft lithography masks etc. At Tanner Labs, we have developed various technologies to micromachine elastomers down to ca. 1 micron feature sizes.

The optical micrograph above depicts 10 micron diameter elastomer posts spaced at 15 microns.