Tanner Laboratories: Your MEMS R&D
Partner
At Tanner Laboratories, we provide low cost MEMS prototyping
services to our government, academic, and commercial partners.
We have an in house clean room (300 sq ft. class 100 litho
bay and two class 1000 bays; total area ca. 1100 sq ft.)
fully staffed with scientists and engineers spanning a broad
range of discipline (traditional and non-traditional MEMS,
CMOS design, modeling and control systems).
Download the Tanner
MEMS Overview 
|
|
| Clean Room Process
Equipment |
|
•
|
PR Spinner
|
|
•
|
Contact Mask aligner
(upto 8” wafers, front side and back side alignment;
ca. 0.5 um registration) |
|
•
|
Hot plates, ovens,
ultrasound baths |
|
•
|
Fume hoods for
acids, bases, and solvents |
|
•
|
Sputtering (3
gun RF magnetron; upto 8” wafers) |
|
•
|
DRIE (STS, upto
6” wafers) |
|
•
|
Parylene deposition
system |
|
•
|
Micro RIE |
|
| Technologies Developed |
|
•
|
SU-8 |
|
•
|
Elastomers |
|
•
|
Lift off etching
for sputtered films |
| Technologies Under Development |
|
•
|
Nanoscale lithography |
|
•
|
Nanopropulsion systems
|
|
•
|
Micro patterned teflon
|
|
| Customer Profile |
|
•
|
Government: DoD,
NIH, NASA |
|
•
|
Academic: (Caltech) |
|
•
|
Commercial: early
stage MEMS/biotech startups & mainstream MEMS
adopters looking to highly leverage their investment
resources. |
|
|
