MEMS Design: L-Edit MEMS

Tanner Tools L-Edit MEMS solution provides unsurpassed capabilities for MEMS designs on the Windows® platform.

• All-angle polygon support
• Complete layer visualization
• All-angle DRC
• Robust algorithm for all curved objects
• High resolution EPS output
• Full AutoCAD DXF input/output compatibility

All-angle polygon support
Complex Boolean and derived layer operations can be performed with arbitrary polygonal curves & shapes. Complex shapes with non-standard "holes" and openings are simple to create and manipulate. For example, Boolean operations ease mechanical reliefs and DRIE curved etch patterns while maintaining the actual design geometries on separate layers.

Complete layer visualization
With L-Edit, MEMS designers can easily see overlapping polygons, curves, and other geometries, removing any uncertainty in the design process. Rendering and design redraw times are minimal, with complete control over the display interaction between each layer.

All-angle DRC
This new capability is indispensable for error checking MEMS structures composed of non-standard curves and geometries. L-Edit design rule checking can be set to flag your custom process tolerances, as well as to flag for objects with too many vertices, resolving problems with curve fracturing in manufacture.

Robust algorithm for all curved objects
See your actual MEMS designs prior to the mask making process. This new user controllable "snap to manufacturing grid" improves curve rendition for pies, tori and circles and all other curves, eliminating any approximation errors and unexpected surprises.

High resolution EPS output
For designers using a 10X stepper process, the L-Edit postscript output macro enables low cost transparency 10X-masks to be output for commercial print houses. There's no need to use other software for EPS output. Just choose the layers you want to output, designate a clear field and dark field…and you're done.

Full AutoCAD DXF input/output compatibility
L-Edit let's you read and write AutoCAD's DXF file format directly from the L-Edit menu, so you never have to leave the program. L-Edit also supports the industry standard GDSII format for fabrication ready file output.